A sequence of processes, including oxidation, photolithography, etching, doping, deposition and planarization on a wafer, performed in a clean-room environment, are involved in semiconductor manufacturing. All these processes, as well as the formation of the single-crystal ingot (wafers are sliced from it) and the clean-room design, are related to the transport phenomena of momentum (fluid mechanics), heat, and mass (including particulate matter). Understanding those transport phenomena is crucial for better design of the processes and products. The theme of this course is to study the transport phenomena in details of these processes, from the viewpoint of fluid mechanics. As the critical dimension of the semiconductor product decrease, mechanics in nano-scales related to the processes will also be addressed. Also discussed in the course is the environmental impact arising from the chemical wastes in semiconductor manufacturing.